Reaction and structure of Ti on Si probed by surface extended energy?loss fine structure and extended appearance potential fine structure

dc.contributor.authorIdzerda, Y. U.
dc.contributor.authorWilliams, Ellen D.
dc.contributor.authorEinstein, Theodore L.
dc.contributor.authorPark, R. L.
dc.date.accessioned2024-03-11T15:55:11Z
dc.date.available2024-03-11T15:55:11Z
dc.date.issued1987
dc.descriptionThis article appeared in the Journal of Vacuum Science & Technology A and can be found at https://doi.org/10.1116/1.574323.
dc.description.urihttps://doi.org/10.1116/1.574323
dc.identifierhttps://doi.org/10.13016/pvta-bdjq
dc.identifier.citationY. U. Idzerda, E. D. Williams, T. L. Einstein, R. L. Park; Reaction and structure of Ti on Si probed by surface extended energy?loss fine structure and extended appearance potential fine structure. J. Vac. Sci. Technol. A 1 July 1987; 5 (4): 847–851.
dc.identifier.urihttp://hdl.handle.net/1903/32274
dc.publisherAIP
dc.titleReaction and structure of Ti on Si probed by surface extended energy?loss fine structure and extended appearance potential fine structure
dc.typeArticle

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