Reaction and structure of Ti on Si probed by surface extended energy?loss fine structure and extended appearance potential fine structure

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dc.contributor.authorIdzerda, Y. U.
dc.contributor.authorWilliams, Ellen D.
dc.contributor.authorEinstein, Theodore L.
dc.contributor.authorPark, R. L.
dc.date.accessioned2024-03-11T15:55:11Z
dc.date.available2024-03-11T15:55:11Z
dc.date.issued1987
dc.descriptionThis article appeared in the Journal of Vacuum Science & Technology A and can be found at https://doi.org/10.1116/1.574323.
dc.description.urihttps://doi.org/10.1116/1.574323
dc.identifierhttps://doi.org/10.13016/pvta-bdjq
dc.identifier.citationY. U. Idzerda, E. D. Williams, T. L. Einstein, R. L. Park; Reaction and structure of Ti on Si probed by surface extended energy?loss fine structure and extended appearance potential fine structure. J. Vac. Sci. Technol. A 1 July 1987; 5 (4): 847–851.
dc.identifier.urihttp://hdl.handle.net/1903/32274
dc.publisherAIP
dc.titleReaction and structure of Ti on Si probed by surface extended energy?loss fine structure and extended appearance potential fine structure
dc.typeArticle

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