Reaction and structure of Ti on Si probed by surface extended energy?loss fine structure and extended appearance potential fine structure

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1987

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Y. U. Idzerda, E. D. Williams, T. L. Einstein, R. L. Park; Reaction and structure of Ti on Si probed by surface extended energy?loss fine structure and extended appearance potential fine structure. J. Vac. Sci. Technol. A 1 July 1987; 5 (4): 847–851.

Abstract

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This article appeared in the Journal of Vacuum Science & Technology A and can be found at https://doi.org/10.1116/1.574323.

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