Reaction and structure of Ti on Si probed by surface extended energy?loss fine structure and extended appearance potential fine structure
Reaction and structure of Ti on Si probed by surface extended energy?loss fine structure and extended appearance potential fine structure
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1987
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Y. U. Idzerda, E. D. Williams, T. L. Einstein, R. L. Park; Reaction and structure of Ti on Si probed by surface extended energy?loss fine structure and extended appearance potential fine structure. J. Vac. Sci. Technol. A 1 July 1987; 5 (4): 847–851.
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This article appeared in the Journal of Vacuum Science & Technology A and can be found at https://doi.org/10.1116/1.574323.