Reaction and structure of Ti on Si probed by surface extended energy?loss fine structure and extended appearance potential fine structure

Idzerda, Y. U.; Williams, Ellen D.; Einstein, Theodore L.; Park, R. L.

Reaction and structure of Ti on Si probed by surface extended energy?loss fine structure and extended appearance potential fine structure

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1987IdzerdaEDWRLPTiOnSiSELF&EAPFS-JVSTA.pdf (719.28 KB)

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Publication or External Link

https://doi.org/10.1116/1.574323

Date

1987

Authors

Idzerda, Y. U.

Williams, Ellen D.

Einstein, Theodore L.

Park, R. L.

Citation

Y. U. Idzerda, E. D. Williams, T. L. Einstein, R. L. Park; Reaction and structure of Ti on Si probed by surface extended energy?loss fine structure and extended appearance potential fine structure. J. Vac. Sci. Technol. A 1 July 1987; 5 (4): 847–851.