An XML-Based Approach to Integrating Semiconductor Process Information

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dc.contributor.advisorAdomaitis, Raymond A.en_US
dc.contributor.authorChen, Jingen_US
dc.contributor.authorAdomaitis, Raymond A.en_US
dc.contributor.departmentISRen_US
dc.date.accessioned2007-05-23T10:12:12Z
dc.date.available2007-05-23T10:12:12Z
dc.date.issued2002en_US
dc.description.abstractThis paper discusses the development of a Java and XML-based semiconductor process information system for experimental data archiving, processing, analysis, presentation and simulation. <p>The three-tier system architecture consists of a web-based GUI interface module, a business-handling module and a data services module. The user-friendly web-based GUI interface enables users to look up experimental results according to operating conditions, or to determine material and process gas physical properties using a physical property estimator, or to query and retrieve experimental data and run client-side simulations in the MATLAB environment. <p>Simulation results can be compared to experimental data to validate process models or used to optimize the operating conditions. The business-handling module interprets user's request to determine which information is required and how that information is extracted and synthesized from the back-end database. After this information is obtained, it is delivered to the users in an appropriate format (XML/HTML).en_US
dc.format.extent67930 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.urihttp://hdl.handle.net/1903/6278
dc.language.isoen_USen_US
dc.relation.ispartofseriesISR; TR 2002-45en_US
dc.subjectNext-Generation Product Realization Systemsen_US
dc.titleAn XML-Based Approach to Integrating Semiconductor Process Informationen_US
dc.typeTechnical Reporten_US

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