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    Monolithic In-Plane Tunable Optical Filter

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    No. of downloads: 1358

    Date
    2008-08-11
    Author
    McGee, Jonathan Adam
    Advisor
    Ghodssi, Reza
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    Abstract
    This thesis presents the development of a Micro-Electro-Mechanical System (MEMS) monolithic in-plane tunable optical filter in both Indium Phosphide and Silicon. By placing one mirror of a waveguide-based Fabry-Perot interferometer on an electrostatically-actuated beam, a tunable filter is constructed. This is the first demonstration of a waveguide-coupled MEMS tunable optical filter in any material system. Filters with a tuning range of 40 nm from a wavelength 1550 nm with a linewidth of 35 nm are demonstrated. Future work will concentrate on improving the filter's optical characteristics, limited by etch-induced facet roughness, and integration with active photonic devices.
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    http://hdl.handle.net/1903/8566
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    • Electrical & Computer Engineering Theses and Dissertations
    • UMD Theses and Dissertations

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