Monolithic In-Plane Tunable Optical Filter

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dc.contributor.advisorGhodssi, Rezaen_US
dc.contributor.authorMcGee, Jonathan Adamen_US
dc.contributor.departmentElectrical Engineeringen_US
dc.contributor.publisherDigital Repository at the University of Marylanden_US
dc.contributor.publisherUniversity of Maryland (College Park, Md.)en_US
dc.date.accessioned2008-10-11T05:44:30Z
dc.date.available2008-10-11T05:44:30Z
dc.date.issued2008-08-11en_US
dc.description.abstractThis thesis presents the development of a Micro-Electro-Mechanical System (MEMS) monolithic in-plane tunable optical filter in both Indium Phosphide and Silicon. By placing one mirror of a waveguide-based Fabry-Perot interferometer on an electrostatically-actuated beam, a tunable filter is constructed. This is the first demonstration of a waveguide-coupled MEMS tunable optical filter in any material system. Filters with a tuning range of 40 nm from a wavelength 1550 nm with a linewidth of 35 nm are demonstrated. Future work will concentrate on improving the filter's optical characteristics, limited by etch-induced facet roughness, and integration with active photonic devices.en_US
dc.format.extent5804294 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.urihttp://hdl.handle.net/1903/8566
dc.language.isoen_US
dc.subject.pqcontrolledEngineering, Electronics and Electricalen_US
dc.subject.pquncontrolledIndium Phosphideen_US
dc.subject.pquncontrolledOptical Filteren_US
dc.subject.pquncontrolledTunable Filteren_US
dc.subject.pquncontrolledSilicon-On-Insulatoren_US
dc.titleMonolithic In-Plane Tunable Optical Filteren_US
dc.typeThesisen_US

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