Institute for Systems Research Technical Reports

The current plan in the modernization of the A/G communications is to migrate from analog voice only system to integrated digital voice and data system. The next generation satellite systems can be an alternative to the terrestrial A/G systems by their low propagation and transmission delays, global coverage, high capacity, and free flight suitable characteristics. In this paper, we give an overview of the current and the future ATC architectures, describe the systems and the communications issues in these systems, and develop a framework in which LEO/MEO next generation satellite systems can be integrated to the future ATC systems.

This research aims at developing and implementing simulation-based operations research techniques to facilitate System Control (through sensitivity analysis) and System Design (through optimization) for semiconductor manufacturing systems.

Sensitivity analysis for small changes in input parameters is performed using gradient estimation techniques. Gradient estimation methods are evaluated by studying the state of the art and comparing the finite difference method and simultaneous perturbation method by applying them to a stochastic manufacturing system. The results are compared with the gradients obtained through analytical queueing models. The finite difference method is implemented in a heterogeneous simulation environment (HSE)-based decision support tool for process engineers. This tool performs heterogeneous simulations and sensitivity analyses.

The gradient-based techniques used for sensitivity analysis form the building blocks for a gradient-based discrete stochastic optimization procedure. This procedure is applied to the problem of allocating a limited budget to machine purchases to achieve throughput requirements and minimize cycle time. The performance of the algorithm is evaluated by applying the algorithm on a wide range of problem instances.

By monitoring the resonant frequency of exhaust process gases, the depletion of WF6 resulting from the reduction by H2 was readily observed in the 0.5 Torr process for wafer temperatures ranging from 300 to 350 C. Despite WF6 depletion rates as low as 3-5%, in-situ wafer-state metrology was achieved with an error less than 6% over 17 processed wafers.

This in-situ metrology capability combined with accurate sensor response modeling suggests an effective approach for acoustic process sensing in order to achieve run-to-run process control of the deposited tungsten film thickness.

Our methodology has the following three benefits over the state-of-the-art. First, by using multi-piece molds we can create complex 3D objects that are impossible to create using traditional two piece molds. Second, we make use of sacrificial molds. Therefore, using multi-piece sacrificial molds, we can create parts that pose disassembly problems for permanent molds. Third, mold design steps are significantly automated in our methodology. Therefore, we can create the functional part from the CAD model of the part in a matter of hours and so our approach can be used in small batch manufacturing environments.

The basic idea behind our mold design algorithm is as follows. We first form the desired gross mold shape based on the feature-based description of the part geometry. If the desired gross mold shape is not manufacturable as a single piece, we decompose the gross mold shape into simpler shapes to make sure that each component is manufacturable using CNC machining. During the decomposition step, we account for tool accessibility to make sure that (1) each component is manufacturable, and (2) components can be assembled together to form the gross mold shape. Finally, we add assembly features to mold component shapes to facilitate easy assembly of mold components and eliminate unnecessary degree of freedoms from the final mold assembly.

Numericalexperiments on a queueing model with high-dimensional parameter vectorsdemonstrate orders of magnitude faster convergence using thesealgorithms over related $(N+1)$-Simulation finite difference analoguesand another two-simulation finite difference algorithm that updates incycles.

These gradient methods are of significant use in complex manufacturingsystems like semiconductor manufacturing systems where we havea large number of input parameters which affect the average total cycle time.These gradient estimation methods can estimate the impact thatthese input parameters have and identify theparameters that have the maximum impact on system performance.

In this thesis we consider an alternative network architecture, where largeheterogeneous networks are built from small homogeneous networksinterconnected by carefully designed proxy systems. We describe the designand implementation of such a proxy and demonstrate marked performanceimprovements over both actual and simulated satellite channels. We alsodiscuss some benefits and drawbacks of using proxies in networks andexplore some tradeoffs in proxy design.