NANOPOROUS AAO: A PLATFORM FOR REGULAR HETEROGENEOUS NANOSTRUCTURES AND ENERGY STORAGE DEVICES

dc.contributor.advisorRubloff, Gary Wen_US
dc.contributor.authorPerez, Israelen_US
dc.contributor.departmentMaterial Science and Engineeringen_US
dc.contributor.publisherDigital Repository at the University of Marylanden_US
dc.contributor.publisherUniversity of Maryland (College Park, Md.)en_US
dc.date.accessioned2010-02-19T06:35:54Z
dc.date.available2010-02-19T06:35:54Z
dc.date.issued2009en_US
dc.description.abstractNanoporous anodic aluminum oxide (AAO) has vast implications as a tool for nanoscience research and as a nanostructure in which nanoscale devices can be fabricated because of its regular and ordered nanopores. Self-assembly plays a critical role in pore ordering, causing nanopores to grow parallel with one another in high density. The mild electrochemical conditions in which porous AAO grows along with its relatively cheap starting materials makes this nanomaterial a cost effective alternative to advanced photolithography techniques for forming high surface area nanostructures over large areas. In this research, atomic layer deposition (ALD) was used to deposit conformal films within in nanoporous AAO with hopes to 1) develop methodologies to characterize ALD depositions within its high aspect ratio nanopores and 2) to better understand how to use nanoporous AAO templates as a scaffold for energy devices, specifically Metal-Insulator-Metal (MIM) capacitors. Using the nanotube template synthesis method, ALD films were deposited onto nanoporous AAO, later removing the films deposited within the templates nanopores for characterization in TEM. This nanotube metrology characterization involves first obtaining images of full length ALD-AAO nanotubes, and then measuring wall thickness as a function of depth within the nanopore. MIM nanocapacitors were also constructed in vertical AAO nanopores by deposition of multilayer ALD films. MIM stacks were patterned into micro-scale capacitors for electrical characterization.en_US
dc.identifier.urihttp://hdl.handle.net/1903/9828
dc.subject.pqcontrolledEngineering, Materials Scienceen_US
dc.subject.pquncontrolledAnodic aluminum oxideen_US
dc.subject.pquncontrolledatomic layer depositionen_US
dc.subject.pquncontrolledcapactiorsen_US
dc.subject.pquncontrolledenergyen_US
dc.subject.pquncontrolledNanoporesen_US
dc.subject.pquncontrollednanotubesen_US
dc.titleNANOPOROUS AAO: A PLATFORM FOR REGULAR HETEROGENEOUS NANOSTRUCTURES AND ENERGY STORAGE DEVICESen_US
dc.typeDissertationen_US

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