Improvements in Microboiling Device Design

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dc.contributor.advisorRubloff, Gary Wen_US
dc.contributor.authorCarrier, Michael Jamesen_US
dc.contributor.departmentMaterial Science and Engineeringen_US
dc.contributor.publisherDigital Repository at the University of Marylanden_US
dc.contributor.publisherUniversity of Maryland (College Park, Md.)en_US
dc.date.accessioned2011-07-06T06:00:41Z
dc.date.available2011-07-06T06:00:41Z
dc.date.issued2011en_US
dc.description.abstractSmall ribbon heaters (10 μm - 20 μm wide) have been used for many years to study the formation of microbubbles in liquids when short voltage pulses are applied. This thesis describes improvements in the device design with an emphasis on smaller and more sensitive heaters. I used a novel method of creating 250 nanometer wide heaters to keep both the fabrication time and costs as low as possible by using a focused ion beam to create the heaters from a set of larger devices. Ribbon heaters are usually fabricated on a thin SiO2 layer on a silicon wafer which acts as a large heat sink whose effect becomes more pronounced the smaller the heater width. Suspending the heaters on a thin membrane dramatically increased their sensitivity in microboiling experiments. The suspended devices required the development of a very low stress platinum deposition process.en_US
dc.identifier.urihttp://hdl.handle.net/1903/11569
dc.subject.pqcontrolledMaterials Scienceen_US
dc.subject.pqcontrolledEngineeringen_US
dc.subject.pquncontrolledMicroboilingen_US
dc.subject.pquncontrolledMicrobubblesen_US
dc.subject.pquncontrolledMicroheateren_US
dc.subject.pquncontrolledSiN Membraneen_US
dc.subject.pquncontrolledSuspended Heateren_US
dc.titleImprovements in Microboiling Device Designen_US
dc.typeThesisen_US

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