Enhancement of an indium phosphide resonator sensor microsystem through the development of an adaptive feedback circuit and electrospray deposition

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dc.contributor.advisorGhodssi, Rezaen_US
dc.contributor.authorFan, Xiao Zhuen_US
dc.contributor.departmentElectrical Engineeringen_US
dc.contributor.publisherDigital Repository at the University of Marylanden_US
dc.contributor.publisherUniversity of Maryland (College Park, Md.)en_US
dc.date.accessioned2009-10-06T06:49:34Z
dc.date.available2009-10-06T06:49:34Z
dc.date.issued2009en_US
dc.description.abstractCantilever resonator sensor enhancement through the development of an adaptive feedback circuit and the use of electrospray deposition is presented. The feedback system adapts to a wide range of resonators by implementing a hill climbing algorithm, locking onto the cantilever's resonance condition. Eight different cantilever-based sensors (Length=40-75μm), resonating at 201.0kHz to 592.1kHz, with a minimum standard deviation of 11.8Hz, corresponding to a mass resolution limit of 123fg for the device, have been dynamically detected using a single circuit. Electrospray deposition of thin-films on multiple substrate materials and released microstructures has been performed. An average deposition rate of 9.5±5nm/min was achieved with an average surface roughness of 4.5nm on a 197nm thick film. This technology will enable a post-processing method for depositing absorbing layers for sensing applications. With the development of these two technologies, the practical functionality of a chip-scale sensor microsystem will be more readily realized.en_US
dc.format.extent6380288 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.urihttp://hdl.handle.net/1903/9679
dc.language.isoen_US
dc.subject.pqcontrolledEngineering, Electronics and Electricalen_US
dc.subject.pquncontrolledAdaptive Feedback Circuiten_US
dc.subject.pquncontrolledElectrospray Depositionen_US
dc.subject.pquncontrolledHill Climbing Algorithmen_US
dc.subject.pquncontrolledIndium Phosphide Cantileveren_US
dc.subject.pquncontrolledWaveguide Resonatoren_US
dc.titleEnhancement of an indium phosphide resonator sensor microsystem through the development of an adaptive feedback circuit and electrospray depositionen_US
dc.typeThesisen_US

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