Nanoscale Mixed Ion-Electron Conducting NASICON-type Thin-Films: Lithium Titanium Phosphate via Atomic Layer Deposition

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dc.contributor.advisorRubloff, Gary W.
dc.contributor.authorFontecha, Daniela
dc.contributor.authorKozen, Alexander
dc.contributor.authorStewart, David M.
dc.contributor.authorHall, Alex T.
dc.contributor.authorCumings, John
dc.contributor.authorRubloff, Gary W.
dc.contributor.authorGregorczyk, Keith E.
dc.date.accessioned2025-03-24T20:36:20Z
dc.date.issued2025
dc.description.abstractThe attached data encompasses the raw data files and processed XPS data for the article “Nanoscale Mixed Ion-Electron Conducting NASICON-type Thin-Films: Lithium Titanium Phosphate via Atomic Layer Deposition
dc.description.sponsorshipThis work was supported by Murata Integrated Passive Solutions, the U.S. Department of Energy, and the National Science Foundation. Murata supported the evaluation and testing of ALD solid electrolyte materials for application in 3D solid state capacitor structures. Under the Office of Science, Office of Basic Energy Sciences, Grant DE-SC0021070, DOE supported the synthesis of Li-containing titanium phosphates with composition varied through a dopant-supercycle process. A.T.H. and J.C. acknowledge support from the Center for Enhanced Nanofluidic Transport (CENT), an Energy Frontier Research Center funded by the U.S. Department of Energy, Office of Science, Basic Energy Sciences, under Award # DE-SC0019112. D.R.F was supported by the National Science Foundation Graduate Research Fellowship Program under Grant No. DGE 1840340. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.
dc.identifierhttps://doi.org/10.13016/sop4-xnxj
dc.identifier.urihttp://hdl.handle.net/1903/33816
dc.language.isoen_US
dc.publisherAmerican Chemical Society
dc.relation.isAvailableAtA. James Clark School of Engineeringen_us
dc.relation.isAvailableAtMaterials Science & Engineeringen_us
dc.relation.isAvailableAtDigital Repository at the University of Marylanden_us
dc.relation.isAvailableAtUniversity of Maryland (College Park, MD)en_us
dc.rightsAttribution-NoDerivs 3.0 United Statesen
dc.rights.urihttp://creativecommons.org/licenses/by-nd/3.0/us/
dc.subjectEnergy Storage
dc.subjectComposite Electrodes
dc.subjectNanocomposite
dc.subjectLithium-ion Batteries
dc.subjectThin Film Batteries
dc.subjectIonic Materials
dc.subjectAtomic Layer Deposition
dc.subjectNASICON-type Thin Film
dc.titleNanoscale Mixed Ion-Electron Conducting NASICON-type Thin-Films: Lithium Titanium Phosphate via Atomic Layer Deposition
dc.typeDataset
local.equitableAccessSubmissionNo

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