Recognizing Geometrically Complex Beams using Compliance Metric in MEMS Extraction

dc.contributor.authorBellam, S.en_US
dc.contributor.authorGupta, Satyandra K.en_US
dc.contributor.authorPriyadarshi, A. K.en_US
dc.contributor.departmentISRen_US
dc.date.accessioned2007-05-23T10:12:19Z
dc.date.available2007-05-23T10:12:19Z
dc.date.issued2002en_US
dc.description.abstractThis report describes a methodology to classify layout geometry as a beam structural element where geometric recognition fails due to shape complexity. FEA-based results are used to detect various structural elements in the layout. FEA-based simulation is applied to parts of the MEMS device layout to identify the relative stiffness of various elements in the layout. These stiffness maps provide valuable hints in correctly recognizing MEMS elements. For example, beam elements are relatively flexible when compared to the plate elements. We anticipate that such a methodology will make the extraction of structural elements for the device layout more robust.en_US
dc.format.extent128691 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.urihttp://hdl.handle.net/1903/6284
dc.language.isoen_USen_US
dc.relation.ispartofseriesISR; TR 2002-56en_US
dc.subjectNext-Generation Product Realization Systemsen_US
dc.titleRecognizing Geometrically Complex Beams using Compliance Metric in MEMS Extractionen_US
dc.typeTechnical Reporten_US

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