EXTREME VERTICAL DISPLACEMENT, HIGH FORCE, SILICON MICROSTAGE ZIPPER ACTUATORS

Simple item page
dc.contributor.advisorDeVoe, Don Len_US
dc.contributor.authorFelder, Jasonen_US
dc.contributor.departmentMechanical Engineeringen_US
dc.contributor.publisherDigital Repository at the University of Marylanden_US
dc.contributor.publisherUniversity of Maryland (College Park, Md.)en_US
dc.date.accessioned2013-10-10T05:33:17Z
dc.date.available2013-10-10T05:33:17Z
dc.date.issued2013en_US
dc.description.abstractLarge vertical deflection, high force microactuators are desired in MEMS for a variety of applications. This thesis details a novel large-displacement electrostatic "zipper" microactuator capable of achieving hundreds of microns of out-of-plane deflection and delivering high forces, fabricated entirely from SOI (silicon-on-insulator). This technology is novel in its use of SiO<sub>2</sub> as both a high quality dielectric and the stressed layer of the bimorph. Geometries are explored analytically, numerically and experimentally to provide the greatest electromechanical output while constraining the device footprint to 1mm<super>2</super>. Device performance was benchmarked against previously established out-of-plane microactuators. We report the first instance of zipper-inspired electrostatic "microstage" actuators whose flat center stage and vertical actuation mode is ideal for carrying and moving a load. Fabricated microstages are capable of achieving out-of-plane deflections up to 1.2 mm, force outputs up to 1 mN, pull-in voltage as low as 20 V, and switching times of 1 ms.en_US
dc.identifier.urihttp://hdl.handle.net/1903/14635
dc.subject.pqcontrolledEngineeringen_US
dc.subject.pqcontrolledMechanical engineeringen_US
dc.subject.pqcontrolledRoboticsen_US
dc.subject.pquncontrolledActuatoren_US
dc.subject.pquncontrolledHigh-K Dielectricen_US
dc.subject.pquncontrolledMEMSen_US
dc.subject.pquncontrolledMicroelectromechanical Systemsen_US
dc.subject.pquncontrolledVertical Deflectionen_US
dc.subject.pquncontrolledZipperen_US
dc.titleEXTREME VERTICAL DISPLACEMENT, HIGH FORCE, SILICON MICROSTAGE ZIPPER ACTUATORSen_US
dc.typeThesisen_US

Files

Original bundle
Now showing 1 - 2 of 2
Thumbnail Image
Name:
Felder_umd_0117N_14459.pdf
Size:
3.66 MB
Format:
Adobe Portable Document Format
Download
No Thumbnail Available
Name:
IMG_1258.MOV
Size:
3.12 MB
Format:
Video Quicktime
Download

Collections

UMD Theses and Dissertations
Mechanical Engineering Theses and Dissertations