ATOMIC LAYER DEPOSITION OF LEAD ZIRCONATE-TITANATE AND OTHER LEAD-BASED PEROVSKITES

Abstract

Lead-based perovskites, especially lead zirconate-titanate (PbZrxTi1-xO3, or PZT), have been of great technological interest since they were discovered in the early 1950s to exhibit large electronic polarization. Atomic layer deposition (ALD) is a thin-film growth technique capable of uniformly coating high aspect-ratio structures due to the self-limited nature of the precursor chemisorption steps in the deposition sequence. In this thesis, a suite of related processes to grow lead-based perovskites by ALD are presented. First, a new process to grow ferroelectric lead titanate (PbTiO3, or PTO) by ALD using lead bis(3-N,N-dimethyl-2-methyl-2-propanoxide) [Pb(DMAMP)2] and tetrakis dimethylamino titanium [TDMAT] as the lead and titanium cation precursors, respectively, is discussed. A 360-nm thick PTO film grown by ALD displayed a maximum polarization of 48 µC/cm2 and remanent polarization of ±30 µC/cm2. Second, a new process (similar to the ALD PTO process) to grow PZT by ALD is demonstrated by partial substitution of TDMAT with either tetrakis dimethylamino zirconium or zirconium tert-butoxide. The 200 nm-thick ALD PZT films exhibited a maximum polarization of 50 µC/cm2 and zero-field dielectric constant of 545 with leakage current density < 0.7 µA/cm2. Third, a new ALD process for antiferroelectric lead hafnate (PbHfO3, or PHO) is presented along with electrical characterization showing a field-induced antiferroelectric to ferroelectric phase transition with applications for capacitive energy storage. Finally, ALD lead hafnate-titanate (PbHfxTi1-xO3, or PHT), considered to be an isomorph of PZT, is demonstrated by combining the process for PTO and PHO. The thin-film PHT grown by ALD is shown to have electronic properties that rival PZT grown at compositions near the morphotropic phase boundary (MPB). The processes for both ALD PZT and PHT are shown to yield films with promising properties for microelectromechanical systems (MEMS) actuators and may help to dramatically increase the areal work density of such devices.