Show simple item record

Leveraging Porous Silicon Carbide to Create Simultaneously Low Stiffness and High Frequency AFM Microcantilevers

dc.contributor.advisorSolares, Santiagoen_US
dc.contributor.authorBarkley, Sariceen_US
dc.date.accessioned2015-02-05T06:40:57Z
dc.date.available2015-02-05T06:40:57Z
dc.date.issued2014en_US
dc.identifierhttps://doi.org/10.13016/M2JC8F
dc.identifier.urihttp://hdl.handle.net/1903/16110
dc.description.abstractMany operative modes of the atomic force microscope (AFM) are optimized by using cantilever probes that have both a low force constant and a high resonance frequency. Due to fabrication limitations, however, this ideal cannot be achieved without resorting to sizes incompatible with standard AFM instrumentation. This project proposes that cantilevers made from electrochemically etched porous silicon carbide (SiC) enjoy reduced force constants without significantly sacrificing frequency or size. The study includes prototype fabrication, as well as parametric experiments on the etching recipe and suggestions to improve the process. Analysis of the mechanical properties of the prototypes proves that introducing porosity to the structure greatly reduces the force constant (porous k = 0.27 bulk k) while only slightly reducing the resonance frequency (porous f0 = 0.86 bulk f0).en_US
dc.language.isoenen_US
dc.titleLeveraging Porous Silicon Carbide to Create Simultaneously Low Stiffness and High Frequency AFM Microcantileversen_US
dc.typeThesisen_US
dc.contributor.publisherDigital Repository at the University of Marylanden_US
dc.contributor.publisherUniversity of Maryland (College Park, Md.)en_US
dc.contributor.departmentMechanical Engineeringen_US
dc.subject.pqcontrolledMechanical engineeringen_US
dc.subject.pqcontrolledNanotechnologyen_US
dc.subject.pqcontrolledNanoscienceen_US
dc.subject.pquncontrolledAFMen_US
dc.subject.pquncontrolledcantileveren_US
dc.subject.pquncontrolledHFen_US
dc.subject.pquncontrolledporousen_US
dc.subject.pquncontrolledprobeen_US
dc.subject.pquncontrolledSiCen_US


Files in this item

Thumbnail

This item appears in the following Collection(s)

Show simple item record