Institute for Systems Research Technical Reports
Permanent URI for this collectionhttp://hdl.handle.net/1903/4376
This archive contains a collection of reports generated by the faculty and students of the Institute for Systems Research (ISR), a permanent, interdisciplinary research unit in the A. James Clark School of Engineering at the University of Maryland. ISR-based projects are conducted through partnerships with industry and government, bringing together faculty and students from multiple academic departments and colleges across the university.
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Item Comparison of Run-to-Run Control Methods in Semiconductor Manufacturing Processes(2000) Zhang, Chang; Deng, Hao; Baras, John S.; Baras, John S.; ISRRun-to Run (RtR) control plays an important role in semiconductor manufacturing.In this paper, RtR control methods are generalized. The set-valued RtR controllers with ellipsoidapproximation are compared with other RtR controllers bysimulation according to the following criteria: A good RtR controller should be able to compensate for variousdisturbances, such as process drifts, process shifts (step disturbance)and model errors; moreover, it should beable to deal with limitations, bounds, cost requirement, multipletargets and time delays that are often encountered in realprocesses.
Preliminary results show the good performance of the set-valued RtRcontroller. Furthermore, this paper shows that it is insufficient to uselinear models to approximate nonlinear processes and it is necessary to developnonlinear model based RtR controllers.
Item Robust Control of Set-Valued Discrete Time Dynamical Systems(1994) Baras, John S.; Patel, N.S.; ISRThis paper presents results obtained for the robust control of discrete time dynamical systems. The problem is formulated and solved using dynamic programming. Both necessary and sufficient conditions in terms of (stationary ) dynamic programming equalities are presented. The output feedback problem is solved using the concept of an information state, where a decoupling between estimation and control is obtained.Item Partially Observed Differential Games, Infinite Dimensional HJI Equations, and Nonlinear HControl(1994) James, Matthew R.; Baras, John S.; ISRThis paper presents new results for partially observed nonlinear differential games, which are applied to the nonlinear output feedback Hrobust control problem. Using the concept of information state, we solve these problems in terms of an infinite dimensional partial differential equation, viz., the Hamilton-Jacobi-Isaacs equation for partial observed differential games. We give definitions of smooth and viscosity solutions, and prove that the value function is a viscosity solution of the HJI equation. We prove a verification theorem, which implies that the optimal controls are separated in that they depend on the observations through the information state. This constitutes a separation principle for partially observed differential games. We also present some new results concerning the certainty equivalence principle.Item Robust Output Feedback Control for Discrete - Time Nonlinear Systems(1993) James, Matthew R.; Baras, John S.; ISRIn this paper we present a new approach to the solution of the output feedback robust control problem. We employ the recently developed concept of information state for output feedback dynamic games, and obtain necessary and sufficient conditions for the solution to the robust control problem expressed in terms of the information state. The resulting controller is an information state feedback controller, and is intrinsically infinite dimensional. Stability results are obtained using the theory of dissipative systems, and indeed, our results are expressed in terms of dissipation inequalities.Item Output Feedback Risk - Sensitive Control and Differential Games for Continuous - Time Nonlinear Systems(1993) James, Matthew R.; Baras, John S.; Elliott, Robert J.; ISRIn this paper we carry out a formal analysis of an output feedback risk-sensitive stochastic control problem. Using large deviation limits, this problem is related to a deterministic output feedback differential game. Both problems are solved using appropriate information states. The use of an information state for the game problem is new, and is the principal contribution of our work. Our results have implications for the nonlinear robust stabilization problem.Item Consideration on Optimal Design of Distributed Sensors and Actuators Made of Smart Materials for Active Vibration Control(1993) Zhuang, Y.; Baras, John S.; ISRWe describe a design technique for optimal control in active structural vibration damping using smart materials. The vibration of a cantilever beam is stabilized by using distributed sensors and actuators. We model the beam by the Timoshenko beam model together with the distributed sensors and actuators. A control law using the weighted integration of vibration velocity is incorporated in the closed loop system. We propose a method to find the optimal layout design of the smart material so as to maximize the damping effect. An objective functional is defined based on the vibration energy of the system. The optimal shapes of the sensor and actuator are determined through minimizing the energy functional of the beam over the admissible shaped function space subject to certain geometric constraints. An algorithm has been developed to determine the optimal sensor and actuator layout. This method can be generalized to the plate damping problem and more complicated structures as well.