Mechanical Engineering Theses and Dissertations
Permanent URI for this collectionhttp://hdl.handle.net/1903/2795
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Item EXTREME VERTICAL DISPLACEMENT, HIGH FORCE, SILICON MICROSTAGE ZIPPER ACTUATORS(2013) Felder, Jason; DeVoe, Don L; Mechanical Engineering; Digital Repository at the University of Maryland; University of Maryland (College Park, Md.)Large vertical deflection, high force microactuators are desired in MEMS for a variety of applications. This thesis details a novel large-displacement electrostatic "zipper" microactuator capable of achieving hundreds of microns of out-of-plane deflection and delivering high forces, fabricated entirely from SOI (silicon-on-insulator). This technology is novel in its use of SiO2 as both a high quality dielectric and the stressed layer of the bimorph. Geometries are explored analytically, numerically and experimentally to provide the greatest electromechanical output while constraining the device footprint to 1mm2. Device performance was benchmarked against previously established out-of-plane microactuators. We report the first instance of zipper-inspired electrostatic "microstage" actuators whose flat center stage and vertical actuation mode is ideal for carrying and moving a load. Fabricated microstages are capable of achieving out-of-plane deflections up to 1.2 mm, force outputs up to 1 mN, pull-in voltage as low as 20 V, and switching times of 1 ms.Item Towards the Use of Dielectric Elastomer Actuators as Locomotive Devices for Millimeter-Scale Robots(2012) Pearse, Justin Daminabo; Smela, Elisabeth; Mechanical Engineering; Digital Repository at the University of Maryland; University of Maryland (College Park, Md.)Dielectric elastomer actuators (DEAs) are electromechanical transducers that are promising for small scale applications. The work presented in this thesis seeks to develop DEAs as an actuation technology that would serve the purpose of ambulating millimeter-scale robots in a robust and predictable manner. To begin, the "planar" DEA configuration was characterized and the performances of various elastomers were investigated. Then, based on the requirements of a proposed robot walking gait, two principles were examined as means of converting in-plane actuation strain to bending actuation. Bending DEAs were fabricated and tested, and a maximum end displacement of 1.5 mm was achieved for a 10 mm long sample. Bending actuator design was optimized by maximizing both speed and payload capabilities. Finally, some challenges facing the design of robots ambulated by DEAs were outlined; of particular note is the DEAs' electrostatic interaction with each other and their surroundings.