A Framework for Robust Run by Run Control with Lot Delayed Measurement

dc.contributor.author	Baras, John S.	en_US
dc.contributor.author	Patel, N.S.	en_US
dc.contributor.department	ISR	en_US
dc.date.accessioned	2007-05-23T09:59:25Z
dc.date.available	2007-05-23T09:59:25Z
dc.date.issued	1995	en_US
dc.description.abstract	This paper considers the run by run control problem. We develop a framework to solve the problem in a robust fashion. The framework also encompasses the case where the system is subject to delayed measurements. Recent results available for the control of such systems are reviewed, and two simple examples are presented. The first example is based on the end-pointing problem for a deposition process, and is subject to noise which has both Gaussian and uniform components. The second one is concerned with rate control in a LPCVD reactor.	en_US
dc.format.extent	764275 bytes
dc.format.mimetype	application/pdf
dc.identifier.uri	http://hdl.handle.net/1903/5653
dc.language.iso	en_US	en_US
dc.relation.ispartofseries	ISR; TR 1995-69	en_US
dc.subject	robust control	en_US
dc.subject	run by run control	en_US
dc.subject	Systems Integration Methodology	en_US
dc.title	A Framework for Robust Run by Run Control with Lot Delayed Measurement	en_US
dc.type	Technical Report	en_US

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