Simulation-Based Approach for Semiconductor Fab-Level Decision Making - Implementation Issues

Loading...
Thumbnail Image

Files

TR_2000-48.pdf (257.28 KB)
No. of downloads: 857

Publication or External Link

Date

Advisor

Marcus, Steven I.

Citation

DRUM DOI

Abstract

In this paper, we discuss implementation issues of applying a simulation-based approach to asemiconductor fab-level decision making problem. The fab-level decision making problem isformulated as a Markov Decision Process (MDP). We intend to use a simulation-based approach sinceit can break the "curse of dimensionality" and the "curse of modeling" for an MDP with largestate and control spaces. We focus on how to parameterize the state space and the control space.

Notes

Rights