WaterSim: A Computer Simulator and Integrated Educational Module for Semiconductor Manufacturing Systems

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The WaterSim program is an easy-to-use graphical user interface, a unique simulation module and an integrated educational module that was developed at the Institute for Systems Research at the University of Maryland.

WaterSim simplifies the process of semiconductor manufacturing while teaching students engineering principles and the importance of recycling. The module was created to eliminate esoteric simulation codesand hard-to-understand models which have made it difficult to teachengineering principles to students.

As a participant in the Research Experiences for Undergraduates (REU)program, my role in the WaterSim project was a three-fold process. My firstrole was to create integrated html educational material for the simulator.

My second role was to learn about the simulation techniques that are being developed at ISR and integrate them with the Center for Environmentally-Benign Semiconductor Manufacturing (CEBSN) at the University of Arizona. This process involved creating simulation-basedlearning models with DELPHI and Vissim-based software.

My third role was to research the effects of recycling in ultra pure water (UPW)systems and its effects on a semiconductor manufacturing system. Theresults of this 8-week research include:

-- A beta version of an easy-to-use graphical user intervace called WaterSim

-- An integrated educational manual with written material

-- The formulation of web-based tutorials that exploit WaterSim's majorfeatures

-- An installation program specific to WaterSim that simplifies thedistribution of the product

-- Knowledge ofVissim and Delphi software to create simulations