TSV-Constrained Micro-Channel Infrastructure Design for Cooling Stacked 3D-ICs

Abstract

Micro-channel based liquid cooling has significant capability of removing high density heat in 3D-ICs. The conventional micro-channel structures investigated for cooling 3D-ICs use straight channels. However, the presence of TSVs which form obstacles to the micro-channels prevents distribution of straight micro-channels. In this paper, we investigate the methodology of designing TSV-constrained micro-channel infrastructure. Specifically, we decide the locations and geometry of micro-channels with bended structure so that it's cooling e®ectiveness is maximized. Our micro-channel structure could achieve up to 87% pumping power saving compared with the micro-channel structure using straight channels.