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Closed-Loop Control of a Micropositioner Using Integrated Photodiode Sensors

dc.contributor.advisorGhodssi, Rezaen_US
dc.contributor.authorBeyaz, Mustafa Ilkeren_US
dc.date.accessioned2008-10-11T05:52:16Z
dc.date.available2008-10-11T05:52:16Z
dc.date.issued2008-08-11en_US
dc.identifier.urihttp://hdl.handle.net/1903/8593
dc.description.abstractA closed-loop control system with photodiode position sensors has been implemented in a microball bearing supported linear electrostatic micromotor to improve accuracy and reliability. The fabrication sequence of the previously developed micromotor was modified to integrate a photodiode-based position sensing mechanism. Proportional control law is used in the control system and device step response is analyzed for several step sizes at various maximum applied voltages by varying the constant of proportionality. Two critical functions for micropositioning applications have been demonstrated; the device can establish a necessary frame of reference for coordinate-based positioning and autonomously respond to arbitrary disturbances. The closed-loop position control system presented in this work illustrates the feasibility and functionality of smart microsystems using integrated feedback sensors.en_US
dc.format.extent6949300 bytes
dc.format.mimetypeapplication/pdf
dc.language.isoen_US
dc.titleClosed-Loop Control of a Micropositioner Using Integrated Photodiode Sensorsen_US
dc.typeThesisen_US
dc.contributor.publisherDigital Repository at the University of Marylanden_US
dc.contributor.publisherUniversity of Maryland (College Park, Md.)en_US
dc.contributor.departmentElectrical Engineeringen_US
dc.subject.pqcontrolledEngineering, Electronics and Electricalen_US
dc.subject.pquncontrolledMEMSen_US
dc.subject.pquncontrolledClosed-Loop Controlen_US


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