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Test Methodologies for Dynamic Fracture Strength of Single Crystal Silicon

dc.contributor.advisorBarker, Donald Ben_US
dc.contributor.authorHasin, Saifaen_US
dc.date.accessioned2008-06-20T05:37:53Z
dc.date.available2008-06-20T05:37:53Z
dc.date.issued2008-05-01en_US
dc.identifier.urihttp://hdl.handle.net/1903/8195
dc.description.abstractSingle crystal silicon (SCSi) is the primary component for many microelectromechanical systems (MEMS). Therefore, identification of the dynamic fracture strength of SCSi can tremendously aid in virtual qualification of new MEMS devices used in dynamic loading applications. Unfortunately, the fracture strength is influenced by surface flaws, which are functions of microfabrication processing techniques. This work assesses the influence of deep reactive ion etching (DRIE) technology on the dynamic fracture strength of SCSi. The primary focus was to develop test methodologies that can be used for identifying the dynamic fracture strength of SCSi. The methodologies developed were applied to simple MEMS shock test structures to measure preliminary dynamic fracture strength values. Based on the experiments performed thus far, the dynamic fracture strength of DRIE processed (100) SCSi is >1.10 GPa and <1.37 GPa for bending around <100> and <110> directions, respectively. A statistically significant number of tests will be performed in the near future for verifying these fracture strength values and quantifying the uncertainties. Finally, recommendations are provided for the planned future experiments.en_US
dc.format.extent2382427 bytes
dc.format.mimetypeapplication/pdf
dc.language.isoen_US
dc.titleTest Methodologies for Dynamic Fracture Strength of Single Crystal Siliconen_US
dc.typeThesisen_US
dc.contributor.publisherDigital Repository at the University of Marylanden_US
dc.contributor.publisherUniversity of Maryland (College Park, Md.)en_US
dc.contributor.departmentMechanical Engineeringen_US
dc.subject.pqcontrolledEngineering, Mechanicalen_US
dc.subject.pquncontrolledMEMSen_US
dc.subject.pquncontrolledDRIEen_US
dc.subject.pquncontrolledsingle crystal siliconen_US
dc.subject.pquncontrolledshock testingen_US
dc.subject.pquncontrolleddynamic fracture strengthen_US


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