Skip to content
University of Maryland LibrariesDigital Repository at the University of Maryland
    • Login
    View Item 
    •   DRUM
    • Theses and Dissertations from UMD
    • UMD Theses and Dissertations
    • View Item
    •   DRUM
    • Theses and Dissertations from UMD
    • UMD Theses and Dissertations
    • View Item
    JavaScript is disabled for your browser. Some features of this site may not work without it.

    Test Methodologies for Dynamic Fracture Strength of Single Crystal Silicon

    Thumbnail
    View/Open
    umi-umd-5385.pdf (2.272Mb)
    No. of downloads: 1468

    Date
    2008-05-01
    Author
    Hasin, Saifa
    Advisor
    Barker, Donald B
    Metadata
    Show full item record
    Abstract
    Single crystal silicon (SCSi) is the primary component for many microelectromechanical systems (MEMS). Therefore, identification of the dynamic fracture strength of SCSi can tremendously aid in virtual qualification of new MEMS devices used in dynamic loading applications. Unfortunately, the fracture strength is influenced by surface flaws, which are functions of microfabrication processing techniques. This work assesses the influence of deep reactive ion etching (DRIE) technology on the dynamic fracture strength of SCSi. The primary focus was to develop test methodologies that can be used for identifying the dynamic fracture strength of SCSi. The methodologies developed were applied to simple MEMS shock test structures to measure preliminary dynamic fracture strength values. Based on the experiments performed thus far, the dynamic fracture strength of DRIE processed (100) SCSi is >1.10 GPa and <1.37 GPa for bending around <100> and <110> directions, respectively. A statistically significant number of tests will be performed in the near future for verifying these fracture strength values and quantifying the uncertainties. Finally, recommendations are provided for the planned future experiments.
    URI
    http://hdl.handle.net/1903/8195
    Collections
    • Mechanical Engineering Theses and Dissertations
    • UMD Theses and Dissertations

    DRUM is brought to you by the University of Maryland Libraries
    University of Maryland, College Park, MD 20742-7011 (301)314-1328.
    Please send us your comments.
    Web Accessibility
     

     

    Browse

    All of DRUMCommunities & CollectionsBy Issue DateAuthorsTitlesSubjectsThis CollectionBy Issue DateAuthorsTitlesSubjects

    My Account

    LoginRegister
    Pages
    About DRUMAbout Download Statistics

    DRUM is brought to you by the University of Maryland Libraries
    University of Maryland, College Park, MD 20742-7011 (301)314-1328.
    Please send us your comments.
    Web Accessibility