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Generating 3D Models of MEMS Devices by Process Emulation

dc.contributor.authorBellam, S.en_US
dc.contributor.authorGupta, Satyandra K.en_US
dc.contributor.authorPriyadarshi, A.K.en_US
dc.date.accessioned2007-05-23T10:12:20Z
dc.date.available2007-05-23T10:12:20Z
dc.date.issued2002en_US
dc.identifier.urihttp://hdl.handle.net/1903/6285
dc.description.abstractMEMS designers often use numerical simulation for detecting errors in the mask layout. Numerical simulation involves generating 3D models of MEMS device from the mask layout and process description. The generated models can be meshed and simulated over different domains. This report describes an efficient algorithm that can generate 3D geometric models of MEMS devices. Specifically, the algorithm emulates the manufacturing of a single functional polysilicon layer MEMS devices using the MUMPSprocess.en_US
dc.format.extent1223475 bytes
dc.format.mimetypeapplication/pdf
dc.language.isoen_USen_US
dc.relation.ispartofseriesISR; TR 2002-57en_US
dc.subjectNext-Generation Product Realization Systemsen_US
dc.titleGenerating 3D Models of MEMS Devices by Process Emulationen_US
dc.typeTechnical Reporten_US
dc.contributor.departmentISRen_US


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