Institute for Systems Research Technical Reports

Permanent URI for this collectionhttp://hdl.handle.net/1903/4376

This archive contains a collection of reports generated by the faculty and students of the Institute for Systems Research (ISR), a permanent, interdisciplinary research unit in the A. James Clark School of Engineering at the University of Maryland. ISR-based projects are conducted through partnerships with industry and government, bringing together faculty and students from multiple academic departments and colleges across the university.

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Author: search.filters.author.Lin, Yi-hungSubject: search.filters.subject.simulation

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    From Detailed Simulation to Model Reduction: Development of Numerical Tools for a Plasma Processing Application
    (2000) Lin, Yi-hung; Adomaitis, Raymond A.; ISR
    Low pressure plasma processing is a key step in manufacturing integrated circuits, used both for etching and for enhancing thin film deposition. The plasma discharge reactor systems are characterized by a large number of adjustable parameters and poorly understood transport and reaction mechanisms. This has motivated the vigorous development of models and full scale simulators in the past decade to study various aspects of plasma processing.

    To increase the utility of existing simulators, model reduction methods must be used to extract the dominant spatial characteristics of the discharge; numerically efficient spectral projection methods are then used to generated the reduced model. These practical needs motivated the development of a set of simulation tools that provide a framework for process simulation, model reduction, and analysis of simulator predictions.

    The goals of this thesis were to build this framework by identifying the computationally common elements of semiconductor device manufacturing process simulation, model reduction, and analysis methods, and to test these tools on the difficult problem of RF plasma simulation. The simulation tools were developed as a library of MATLAB functions; the library and demonstration scripts have been distributed through the MWRtools project website.

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    A Collocation/Quadrature-Based Sturm-Liouville Problem Solver
    (1999) Adomaitis, Raymond A.; Lin, Yi-hung; ISR
    We present a computational method for solving a class of boundary-value problemsin Sturm-Liouville form. The algorithms are based on global polynomialcollocation methods and produce discrete representationsof the eigenfunctions. Error control is performed by evaluating theeigenvalue problem residuals generated when the eigenfunctions are interpolatedto a finer discretization grid; eigenfunctions thatproduce residuals exceeding an infinity-norm bound are discarded.Because the computational approach involves the generationof quadrature weights and discrete differentiation operations, our computationalmethods provide a convenient framework for solving boundary-value problemsby eigenfunction expansion and other projection methods.
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    A Computational Framework for Boundary-Value Problem Based Simulations
    (1998) Adomaitis, Raymond A.; Lin, Yi-hung; Chang, Hsiao-Yung; ISR
    A framework is presented for step-by-step implementation of weighted-residualmethods (MWR) for simulations that require the solution ofboundary-value problems. A set of Matlab-based functions ofthe computationally common MWR solution steps has beendeveloped and is used in the application of eigenfunction expansion,collocation, and Galerkin-projection discretizations oftime-dependent, distributed-parameter system models. Fourindustrially relevant examples taken from electronic materialsand chemical processing applications are used to demonstrate thesimulation approach developed.
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    A Global Basis Function Approach to DC Glow Discharge Simulation
    (1997) Lin, Yi-hung; Adomaitis, Raymond A.; ISR
    A global discretization approach was taken to solve a self- consistent DC glow discharge model to study the interplay between modeling assumptions and convergence of the numerical solution techniques. It was found that the assumed form of electron diffusivity temperature dependence had a profound influence on the computed solutions. The numerical techniques developed offer a simple to implement alternative for plasma model discretization.