Browsing by Author "Jamal, Hasina"
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Item REU Report: The Essentials of a Vacuum System(2005) Jamal, Hasina; Sreenivasan, Ramaswamy; ISRThe parts of a chemical vapor deposition (CVD) reactor were examined extensively to create a procedure for placing a metal wafer into the loading chamber, transferring it into the reaction chamber, returning it to the loading chamber, then taking it back out. The instructions were created to learn about vacuum technology.