Simulation-Based Approach for Semiconductor Fab-Level Decision Making - Implementation Issues

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dc.contributor.advisorMarcus, Steven I.en_US
dc.contributor.authorHe, Yingen_US
dc.contributor.authorFu, Michael C.en_US
dc.contributor.authorMarcus, Steven I.en_US
dc.contributor.departmentISRen_US
dc.date.accessioned2007-05-23T10:09:31Z
dc.date.available2007-05-23T10:09:31Z
dc.date.issued2000en_US
dc.description.abstractIn this paper, we discuss implementation issues of applying a simulation-based approach to asemiconductor fab-level decision making problem. The fab-level decision making problem isformulated as a Markov Decision Process (MDP). We intend to use a simulation-based approach sinceit can break the "curse of dimensionality" and the "curse of modeling" for an MDP with largestate and control spaces. We focus on how to parameterize the state space and the control space.en_US
dc.format.extent263458 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.urihttp://hdl.handle.net/1903/6141
dc.language.isoen_USen_US
dc.relation.ispartofseriesISR; TR 2000-48en_US
dc.subjectSimulation-Based Approachen_US
dc.subjectMarkov Decision Processesen_US
dc.subjectSemiconductor Fab-Level Decision Makingen_US
dc.subjectCost Modelen_US
dc.subjectDemand Modelen_US
dc.subjectSensor-Actuator Networksen_US
dc.subjectNext-Generation Product Realization Systemsen_US
dc.titleSimulation-Based Approach for Semiconductor Fab-Level Decision Making - Implementation Issuesen_US
dc.typeTechnical Reporten_US

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