Education in Semiconductor Manufacturing Processes through Physically-Based Dynamic Simulation

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dc.contributor.authorLu, G. Brianen_US
dc.contributor.authorOveissi, Mansouren_US
dc.contributor.authorEckard, Daviden_US
dc.contributor.authorRubloff, Gary W.en_US
dc.contributor.departmentISRen_US
dc.date.accessioned2007-05-23T10:03:34Z
dc.date.available2007-05-23T10:03:34Z
dc.date.issued1997en_US
dc.description.abstractWe have developed physically-based dynamic simulators relevant to semiconductor manufacturing processes, which realistically reflect the time-dependent behavior of equipment, process, sensor, and control systems using commercial simulation software (VixSimTm) under Windows. Following on their successful research use for engineering design, we are applying them to manufacturing education and training. Because they reflect quantitatively and visually the detailed response of the system to user-initiated actions in real time, these simulators promise a new paradigm of active learning through ﲨands-on operation of sophisticated, expensive processing equipment. The student experience is open- ended, offering not only guided exercises but also the chance to experiment freely with the virtual equipment. Simulator modules are in development for use by both experienced engineers and manufacturing operators, with enhanced graphical interfaces tailored to the student and application.en_US
dc.format.extent393623 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.urihttp://hdl.handle.net/1903/5842
dc.language.isoen_USen_US
dc.relation.ispartofseriesISR; TR 1997-4en_US
dc.subjectchemical process controlen_US
dc.subjectmathematical modelingen_US
dc.subjectsimulationen_US
dc.subjectmanufacturingen_US
dc.subjecteducation en_US
dc.subjecttrainingen_US
dc.subjectphysically-baseden_US
dc.subjectIntelligent Control Systemsen_US
dc.titleEducation in Semiconductor Manufacturing Processes through Physically-Based Dynamic Simulationen_US
dc.typeTechnical Reporten_US

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