The Set-Valued Run-to-Run Controller with Ellipsoid Approximation

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dc.contributor.advisorBaras, John S.en_US
dc.contributor.authorZhang, Changen_US
dc.contributor.authorBaras, John S.en_US
dc.contributor.departmentISRen_US
dc.date.accessioned2007-05-23T10:09:24Z
dc.date.available2007-05-23T10:09:24Z
dc.date.issued2000en_US
dc.description.abstractIn order to successfully apply Run-to-Run (RtR) control or real time control ina semiconductor process, it is very important to estimate the processmodel. Traditional semiconductor process control methods neglect theimportance of robustness due to the estimation methods they use. <p>A new approach, namely the set-valued RtR controller with ellipsoidapproximation, is proposed to estimate the process model from acompletely different point of view. Because the set-valued RtRcontroller identifies the process model in the feasible parameter setwhich is insensitive to noises, the controller is robust to theenvironment noises.Ellipsoid approximation can significantly reduce the computation load for the set-valued method. <p>In this paper, the Modified Optimal Volume Ellipsoid (MOVE) algorithm is used toestimate the process model in each run. Designof the corresponding controller and parameter selection of the controller are introduced.Simulation results showed that the controller is robust toenvironment noises and model errors.en_US
dc.format.extent409667 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.urihttp://hdl.handle.net/1903/6135
dc.language.isoen_USen_US
dc.relation.ispartofseriesISR; TR 2000-32en_US
dc.subjectoptimizationen_US
dc.subjectrobust controlen_US
dc.subjectstabilityen_US
dc.subjectmanufacturingen_US
dc.subjectmeasurementsen_US
dc.subjectrun-to-run (RtR) controlen_US
dc.subjectset-valueden_US
dc.subjectellipsoiden_US
dc.subjectmodified OVE (MOVE) algorithmen_US
dc.subjectDHOBE algorithmen_US
dc.subjectsemiconductor manufacturing process control,en_US
dc.titleThe Set-Valued Run-to-Run Controller with Ellipsoid Approximationen_US
dc.typeTechnical Reporten_US

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