Stress Characterization of Stretchable Crystalline Semiconductors

dc.contributor.advisorTompkins, Randy P.en_US
dc.contributor.advisorLazarus, Nathanen_US
dc.contributor.authorCurtis, Sabrina Michelleen_US
dc.contributor.departmentMaterial Science and Engineeringen_US
dc.contributor.publisherDigital Repository at the University of Marylanden_US
dc.contributor.publisherUniversity of Maryland (College Park, Md.)en_US
dc.date.accessioned2018-07-17T06:23:13Z
dc.date.available2018-07-17T06:23:13Z
dc.date.issued2018en_US
dc.description.abstractStretchable crystalline semiconductors are the key to enable wearable high power and energy devices. The work presented in this thesis evaluates the non-uniform surface stress distribution of stretchable Si and GaN serpentine geometries and has yielded the following contributions: (i.) 2D and 3D numerical analyses of the effect of mechanical anisotropy in (100) Si on crystalline stretchable behavior, revealing the <100> direction can be up to 36\% more stretchable than the <110> direction, and (0001) GaN has no anisotropic dependence. (ii.) A micro-fabrication procedure which allows for the fabrication and release of stretchable Si into serpentine mechanical test structures which demonstrated an experimental strain-to-rupture of 84\%. (iii.) In-situ stress characterization of the non-uniform surface stress distribution in stretchable Si, while applying external strain, using micro-Raman spectroscopy. (iv.) A micro-scale imaging technique to spectrally and spatially resolve the local surface stress distribution in stretchable AlGaN/ GaN high electron mobility transistors.en_US
dc.identifierhttps://doi.org/10.13016/M2154DS2F
dc.identifier.urihttp://hdl.handle.net/1903/21020
dc.language.isoenen_US
dc.subject.pqcontrolledMaterials Scienceen_US
dc.subject.pquncontrolledcrystalline semiconductoren_US
dc.subject.pquncontrolledgallium nitrideen_US
dc.subject.pquncontrolledmicro-Raman spectroscopyen_US
dc.subject.pquncontrolledserpentineen_US
dc.subject.pquncontrolledsiliconen_US
dc.subject.pquncontrolledstretchable electronicsen_US
dc.titleStress Characterization of Stretchable Crystalline Semiconductorsen_US
dc.typeThesisen_US

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