Performance Evaluation of Run-to-Run Control Methods in Semiconductor Processes
| dc.contributor.advisor | Baras, John S. | en_US |
| dc.contributor.author | Zhang, Chang | en_US |
| dc.contributor.author | Baras, John S. | en_US |
| dc.contributor.department | ISR | en_US |
| dc.contributor.department | CSHCN | en_US |
| dc.date.accessioned | 2007-05-23T10:11:28Z | |
| dc.date.available | 2007-05-23T10:11:28Z | |
| dc.date.issued | 2001 | en_US |
| dc.description.abstract | Run-to-Run (RtR) control plays an important role in semiconductormanufacturing processes. In this paper, RtR control methods are classified and evaluated. The set-valued RtR controllers with ellipsoid approximation are compared with two typical RtR controllers: the Exponentially Weighted Moving Average (EWMA) controller and the Optimizing Adaptive Quality Controller (OAQC) by simulations according to the following criteria: A good RtR controller should be able to compensate for various disturbances, such as small drifts, step disturbances and model errors; moreover, it should be able to deal with bounds, cost requirement and multipletargets that are often encountered in semiconductor processes. Based on our simulation results, suggestions on selection of a proper RtR controller for a semiconductor process are given as conclusions. | en_US |
| dc.format.extent | 383727 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.identifier.uri | http://hdl.handle.net/1903/6240 | |
| dc.language.iso | en_US | en_US |
| dc.relation.ispartofseries | ISR; TR 2001-44 | en_US |
| dc.relation.ispartofseries | CSHCN; TR 2001-20 | en_US |
| dc.subject | Next-Generation Product Realization Systems | en_US |
| dc.title | Performance Evaluation of Run-to-Run Control Methods in Semiconductor Processes | en_US |
| dc.type | Technical Report | en_US |
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