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Title: Enhancement of an indium phosphide resonator sensor microsystem through the development of an adaptive feedback circuit and electrospray deposition
Authors: Fan, Xiao Zhu
Advisors: Ghodssi, Reza
Department/Program: Electrical Engineering
Type: Thesis
Sponsors: Digital Repository at the University of Maryland
University of Maryland (College Park, Md.)
Subjects: Engineering, Electronics and Electrical
Keywords: Adaptive Feedback Circuit
Electrospray Deposition
Hill Climbing Algorithm
Indium Phosphide Cantilever
Waveguide Resonator
Issue Date: 2009
Abstract: Cantilever resonator sensor enhancement through the development of an adaptive feedback circuit and the use of electrospray deposition is presented. The feedback system adapts to a wide range of resonators by implementing a hill climbing algorithm, locking onto the cantilever's resonance condition. Eight different cantilever-based sensors (Length=40-75μm), resonating at 201.0kHz to 592.1kHz, with a minimum standard deviation of 11.8Hz, corresponding to a mass resolution limit of 123fg for the device, have been dynamically detected using a single circuit. Electrospray deposition of thin-films on multiple substrate materials and released microstructures has been performed. An average deposition rate of 9.5±5nm/min was achieved with an average surface roughness of 4.5nm on a 197nm thick film. This technology will enable a post-processing method for depositing absorbing layers for sensing applications. With the development of these two technologies, the practical functionality of a chip-scale sensor microsystem will be more readily realized.
Appears in Collections:Electrical & Computer Engineering Theses and Dissertations
UMD Theses and Dissertations

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