Digital Repository at the University of Maryland (DRUM)  >
Institute for Systems Research  >
Institute for Systems Research Technical Reports 

Please use this identifier to cite or link to this item: http://hdl.handle.net/1903/6581

Title: REU Report: The Essentials of a Vacuum System
Authors: Jamal, Hasina
Advisors: Sreenivasan, Ramaswamy
Department/Program: ISR
Type: Thesis
Keywords: Next-Generation Product Realization Systems
Issue Date: 2005
Series/Report no.: ISR; UG 2005-1
Abstract: The parts of a chemical vapor deposition (CVD) reactor were examined extensively to create a procedure for placing a metal wafer into the loading chamber, transferring it into the reaction chamber, returning it to the loading chamber, then taking it back out. The instructions were created to learn about vacuum technology.
URI: http://hdl.handle.net/1903/6581
Appears in Collections:Institute for Systems Research Technical Reports

Files in This Item:

File Description SizeFormatNo. of Downloads
UG_2005-1.pdf132.23 kBAdobe PDF2542View/Open

All items in DRUM are protected by copyright, with all rights reserved.

 

DRUM is brought to you by the University of Maryland Libraries
University of Maryland, College Park, MD 20742-7011 (301)314-1328.
Please send us your comments