Adomaitis, RaymondIn this paper, we examine the mathematical structure of thin-film deposition process reaction kinetics models with the goal of determining whether a reaction network can guarantee the self-limiting and stable growth inherent in true atomic layer deposition systems. This analysis is based on identifying reaction invariants and interpreting the chemical significance of these conserved modes. A species-reaction graph approach is introduced to aid in distinguishing “proper” from problematic ALD reaction networks.en-USatomic layer depositionreaction invariantsingularly perturbed systemmodel reductionspecies-reaction graphPreprint