Liau, DarrinThe ability to generate thin films for energy storage has recently gained a lot of interest. Of the techniques able to do this, molecular layer deposition (MLD) is unique because it allows uniformity, conformality, monolayer thickness control, and a wide variety of available materials, including both organic and inorganic materials. MLD was used to synthesize both an organic crown ether polymer electrolyte with potential ion binding and ion conducting properties, and an organic-inorganic Lithium containing thin film for solid electrolyte / anode interface protection. Both films were characterized using x-ray photoelectron spectroscopy and could have future applications in next generation batteries.enVAPOR PHASE SYNTHESIS OF ION CONDUCTING AND ION BINDING MATERIALSThesisChemistrycrown ethermolecular layer depositionthin film