Fontecha, DanielaKozen, AlexanderStewart, David M.Hall, Alex T.Cumings, JohnRubloff, Gary W.Gregorczyk, Keith E.The attached data encompasses the raw data files and processed XPS data for the article “Nanoscale Mixed Ion-Electron Conducting NASICON-type Thin-Films: Lithium Titanium Phosphate via Atomic Layer Depositionen-USEnergy StorageComposite ElectrodesNanocompositeLithium-ion BatteriesThin Film BatteriesIonic MaterialsAtomic Layer DepositionNASICON-type Thin FilmNanoscale Mixed Ion-Electron Conducting NASICON-type Thin-Films: Lithium Titanium Phosphate via Atomic Layer DepositionDataset