Bellam, S.Gupta, Satyandra K.Priyadarshi, A. K.This report describes a methodology to classify layout geometry as a beam structural element where geometric recognition fails due to shape complexity. FEA-based results are used to detect various structural elements in the layout. FEA-based simulation is applied to parts of the MEMS device layout to identify the relative stiffness of various elements in the layout. These stiffness maps provide valuable hints in correctly recognizing MEMS elements. For example, beam elements are relatively flexible when compared to the plate elements. We anticipate that such a methodology will make the extraction of structural elements for the device layout more robust.en-USNext-Generation Product Realization SystemsTechnical Report