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Monolithic In-Plane Tunable Optical Filter

dc.contributor.advisorGhodssi, Rezaen_US
dc.contributor.authorMcGee, Jonathan Adamen_US
dc.description.abstractThis thesis presents the development of a Micro-Electro-Mechanical System (MEMS) monolithic in-plane tunable optical filter in both Indium Phosphide and Silicon. By placing one mirror of a waveguide-based Fabry-Perot interferometer on an electrostatically-actuated beam, a tunable filter is constructed. This is the first demonstration of a waveguide-coupled MEMS tunable optical filter in any material system. Filters with a tuning range of 40 nm from a wavelength 1550 nm with a linewidth of 35 nm are demonstrated. Future work will concentrate on improving the filter's optical characteristics, limited by etch-induced facet roughness, and integration with active photonic devices.en_US
dc.format.extent5804294 bytes
dc.titleMonolithic In-Plane Tunable Optical Filteren_US
dc.contributor.publisherDigital Repository at the University of Marylanden_US
dc.contributor.publisherUniversity of Maryland (College Park, Md.)en_US
dc.contributor.departmentElectrical Engineeringen_US
dc.subject.pqcontrolledEngineering, Electronics and Electricalen_US
dc.subject.pquncontrolledIndium Phosphideen_US
dc.subject.pquncontrolledOptical Filteren_US
dc.subject.pquncontrolledTunable Filteren_US

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