This paper discusses the development of a Java and XML-based semiconductor process information system for experimental data archiving, processing, analysis, presentation and simulation.

The three-tier system architecture consists of a web-based GUI interface module, a business-handling module and a data services module. The user-friendly web-based GUI interface enables users to look up experimental results according to operating conditions, or to determine material and process gas physical properties using a physical property estimator, or to query and retrieve experimental data and run client-side simulations in the MATLAB environment.

Simulation results can be compared to experimental data to validate process models or used to optimize the operating conditions. The business-handling module interprets user's request to determine which information is required and how that information is extracted and synthesized from the back-end database. After this information is obtained, it is delivered to the users in an appropriate format (XML/HTML).