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Performance Evaluation of Run-to-Run Control Methods in Semiconductor Processes

dc.contributor.advisorBaras, John S.en_US
dc.contributor.authorZhang, Changen_US
dc.contributor.authorBaras, John S.en_US
dc.description.abstractRun-to-Run (RtR) control plays an important role in semiconductormanufacturing processes. In this paper, RtR control methods are classified and evaluated. The set-valued RtR controllers with ellipsoid approximation are compared with two typical RtR controllers: the Exponentially Weighted Moving Average (EWMA) controller and the Optimizing Adaptive Quality Controller (OAQC) by simulations according to the following criteria: A good RtR controller should be able to compensate for various disturbances, such as small drifts, step disturbances and model errors; moreover, it should be able to deal with bounds, cost requirement and multipletargets that are often encountered in semiconductor processes. Based on our simulation results, suggestions on selection of a proper RtR controller for a semiconductor process are given as conclusions.en_US
dc.format.extent383727 bytes
dc.relation.ispartofseriesISR; TR 2001-44en_US
dc.relation.ispartofseriesCSHCN; TR 2001-20en_US
dc.subjectNext-Generation Product Realization Systemsen_US
dc.titlePerformance Evaluation of Run-to-Run Control Methods in Semiconductor Processesen_US
dc.typeTechnical Reporten_US

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