WaterSim: A Computer Simulator and Integrated Educational Module for Semiconductor Manufacturing Systems

Abstract

The WaterSim program is an easy-to-use graphical user interface, a unique simulation module and an integrated educational module that was developed at the Institute for Systems Research at the University of Maryland. <p>WaterSim simplifies the process of semiconductor manufacturing while teaching students engineering principles and the importance of recycling. The module was created to eliminate esoteric simulation codesand hard-to-understand models which have made it difficult to teachengineering principles to students.<p>As a participant in the Research Experiences for Undergraduates (REU)program, my role in the WaterSim project was a three-fold process. My firstrole was to create integrated html educational material for the simulator. <p>My second role was to learn about the simulation techniques that are being developed at ISR and integrate them with the Center for Environmentally-Benign Semiconductor Manufacturing (CEBSN) at the University of Arizona. This process involved creating simulation-basedlearning models with DELPHI and Vissim-based software.<p>My third role was to research the effects of recycling in ultra pure water (UPW)systems and its effects on a semiconductor manufacturing system. Theresults of this 8-week research include:<p>-- A beta version of an easy-to-use graphical user intervace called WaterSim<p>-- An integrated educational manual with written material<p>-- The formulation of web-based tutorials that exploit WaterSim's majorfeatures<p>-- An installation program specific to WaterSim that simplifies thedistribution of the product<p>-- Knowledge ofVissim and Delphi software to create simulations<p>