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The Set-Valued Run-to-Run Controller in Semiconductor Manufacturing Processes

dc.contributor.advisorBaras, John S.en_US
dc.contributor.authorZhang, Changen_US
dc.date.accessioned2007-05-23T10:07:24Z
dc.date.available2007-05-23T10:07:24Z
dc.date.issued1999en_US
dc.identifier.urihttp://hdl.handle.net/1903/6031
dc.description.abstractIn semiconductor manufacturing, run-to-run (RtR) control is paid moreand more attention. In this paper a set-valuedRtR control scheme is introduced. Different from conventional RtR controlmethods, the set-valued method first calculates the feasibleparameter set at the beginning of each run, then estimates the modelparameters within this set. Compared to other RtR control schemes, itdoes not assume any statistical property of the noises. In simulation itwas shown that it is robust tomodel and sensor errors, and it has the potential to be applied tohighly nonlinear processes. Furthermore the set-valued method can beapplied to other fields such as signal processing and chemical processes.en_US
dc.format.extent249801 bytes
dc.format.mimetypeapplication/pdf
dc.language.isoen_USen_US
dc.relation.ispartofseriesISR; TR 1999-64en_US
dc.subjectalgorithmsen_US
dc.subjectlinear systemsen_US
dc.subjectnonlinear systemsen_US
dc.subjectoptimizationen_US
dc.subjectrobust controlen_US
dc.subjectstabilityen_US
dc.subjectautomationen_US
dc.subjectmanufacturingen_US
dc.subjectrun-to-run controlen_US
dc.subjectset-valued methoden_US
dc.subjectellipsoid algorithmen_US
dc.subjectOVE algorithmen_US
dc.subjectOBE algorithmen_US
dc.subjectIntelligent Control Systemsen_US
dc.titleThe Set-Valued Run-to-Run Controller in Semiconductor Manufacturing Processesen_US
dc.typeTechnical Reporten_US
dc.contributor.departmentISRen_US


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