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A Spectrally Filtered, Least-Squares Projection Method for Stokes Flow Problems in Driven Cavities
(1999)
A least-squares, weighted residual projection method is presented forcomputingStokes flow solutions to driven cavity problems in rectangular andcylindrical geometries.In this procedure, thevelocity field components are ...
Influence of Gas Composition on Wafer Temperature Control in a Tungsten Chemical Vapor Deposition Reactor
(2000)
Experimental measurements of wafer temperature in a single-wafer,lamp-heated CVD system were used to study the wafer temperature responseto gas composition. A physically based simulation procedure for theprocess gas and ...
Software and Other Teaching Tools Applied to Modeling and Analysis of Distributed Parameter Systems
(1997)
Over the last two years, we have been developing a library of Matlab subprograms integrated with on-line lecture notes in the form of WWW documents which are used in both undergraduate and graduate-level Chemical Engineering ...
Spatially Resolved Compressor Characteristics for Modeling and Control of Blade-Scale Flow Instabilities
(1995)
A numerical techniques cable of simulating blade-scale compression system flow instabilities over times scales spanning tens of rotor revolutions is presented. Simulations of stall inception, growth to fully-developed ...
Analysis of Heat Transfer in a Chemical Vapor Deposition Reactor: An Eigenfunction Expansion Solution Approach
(1997)
A numerical solution procedure combining several weighted residual methods and based on global trial function expansion is developed to solve a model for the steady state gas flow field and temperature distribution in a ...
Model Reduction for RTCVD Optimization
(1996)
A model of a three-zone Rapid Thermal Chemical Vapor Deposition (RTCVD) system is developed to study the effects of spatial wafer temperature patterns on polysilicon deposition uniformity. A sequence of simulated runs is ...
A Collocation/Quadrature-Based Sturm-Liouville Problem Solver
(1999)
We present a computational method for solving a class of boundary-value problemsin Sturm-Liouville form. The algorithms are based on global polynomialcollocation methods and produce discrete representationsof the eigenfunctions. ...
RTCVD Model Reduction: A Collocation on Empirical Eigenfunctions Approach
(1995)
A model of a three-zone Rapid Thermal Chemical Vapor Deposition (RTCVD) system is developed to study the effects of spatial wafer temperature patterns and gas-phase reactant depletion on polysilicon deposition uniformity. ...
An Orthogonal Collocation Technique for Rapid Thermal Processing System Discretization
(1997)
A model of a multiple heating zone Rapid Thermal Processing (RTP) system is developed to study wafer thermal dynamics during a processing cycle. The system is discretized with trial functions generated from the linearized ...
Spectral Filtering for Improved Performance of Collocation Discretization Methods
(2000)
Spectral filtering methods are investigated for use in reducing the Gibbs oscillations that result when discontinuous functions are projected onto globally definedtrial function expansions. Several physical-space filters ...