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Influence of Gas Composition on Wafer Temperature Control in a Tungsten Chemical Vapor Deposition Reactor
Experimental measurements of wafer temperature in a single-wafer,lamp-heated CVD system were used to study the wafer temperature responseto gas composition. A physically based simulation procedure for theprocess gas and ...
Spectral Filtering for Improved Performance of Collocation Discretization Methods
Spectral filtering methods are investigated for use in reducing the Gibbs oscillations that result when discontinuous functions are projected onto globally definedtrial function expansions. Several physical-space filters ...