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Sequencing Wafer Handler Moves to Improve the Performance of Sequential Cluster Tools
(2000)
Cluster tools are highly integrated machines that can perform a sequence of semiconductor manufacturing processes. The sequence of wafer handler moves affects the total time needed to process a set of wafers. Reducing this ...
Real-Time Growth Rate Metrology for a Tungsten CVD Process by Acoustic Sensing
(2000)
An acoustic sensor, the Leybold Inficon ComposerTM, was implemented downstream to a production-scale tungsten chemical vapor deposition (CVD) cluster tool for in-situ process sensing. Process gases were sampled at the ...
A Feature Based Approach to Automated Design of Multi-Piece Sacrificial Molds
(2000)
This report describes a feature-based approach to automated design of multi-piece sacrificial molds. We use multi-piece sacrificial molds to create complex 3D polymer/ceramic parts. Multi-piece molds refer to molds that ...
Selecting Flat End Mills for 2-1/2D Milling Operations
(2000)
The size of milling cutter significantly affects the machining time. Therefore, in order to perform milling operations efficiently, we need to select a set of milling cutters with optimal sizes. It is difficult for human ...
A Geometric Algorithm for Finding the Largest Milling Cutter
(2000)
In this paper, we describe a new geometric algorithm to determine the largest feasible cutter size for2-D milling operations to be performed using a single cutter. In particular:<p>1. We give a general definition of the ...
Randomized Difference Two-Timescale Simultaneous Perturbation Stochastic Approximation Algorithms for Simulation Optimization of Hidden Markov Models
(2000)
We proposetwo finite difference two-timescale simultaneous perturbationstochastic approximation (SPSA)algorithmsfor simulation optimization ofhidden Markov models. Stability and convergence of both thealgorithms is ...
Improving Cluster Tool Performance by Finding the Optimal Sequence and Cyclic Sequence of Wafer Handler Moves
(2000)
The research aims to develop algorithms that can minimize the total lot processing time (makespan) of cluster tools used for semiconductor manufacturing. Previous research focuses on finding an optimal sequence of wafer ...
Designing a Learning Historian for Manufacturing Processes
(2000)
In all aspects of life, reviewing history has proven to have some influence on future decisions. Review of past events is not new to our society. Basketball coaches often review videotapes of games to see what worked well ...
The Set-Valued Run-to-Run Controller with Ellipsoid Approximation
(2000)
In order to successfully apply Run-to-Run (RtR) control or real time control ina semiconductor process, it is very important to estimate the processmodel. Traditional semiconductor process control methods neglect theimportance ...
Comparison of Run-to-Run Control Methods in Semiconductor Manufacturing Processes
(2000)
Run-to Run (RtR) control plays an important role in semiconductor manufacturing.<p>In this paper, RtR control methods are generalized. The set-valued RtR controllers with ellipsoidapproximation are compared with other RtR ...