Now showing items 1-2 of 2
An Object-Oriented Programming Approach to Implement Global Spectral Methods: Application to Dynamic Simulation of a Chemical Infiltration Process
Boundary-value problems (BVPs) in relatively simple geometriescan be solved using global spectral methods. These discretizationmethods are applicable to a wide range of problems and are suitablefor a "rapid prototyping" ...
Influence of Gas Composition on Wafer Temperature Control in a Tungsten Chemical Vapor Deposition Reactor
Experimental measurements of wafer temperature in a single-wafer,lamp-heated CVD system were used to study the wafer temperature responseto gas composition. A physically based simulation procedure for theprocess gas and ...