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An Object-Oriented Programming Approach to Implement Global Spectral Methods: Application to Dynamic Simulation of a Chemical Infiltration Process
(2000)
Boundary-value problems (BVPs) in relatively simple geometriescan be solved using global spectral methods. These discretizationmethods are applicable to a wide range of problems and are suitablefor a "rapid prototyping" ...
Influence of Gas Composition on Wafer Temperature Control in a Tungsten Chemical Vapor Deposition Reactor
(2000)
Experimental measurements of wafer temperature in a single-wafer,lamp-heated CVD system were used to study the wafer temperature responseto gas composition. A physically based simulation procedure for theprocess gas and ...