Search
Now showing items 1-7 of 7
Randomized Difference Two-Timescale Simultaneous Perturbation Stochastic Approximation Algorithms for Simulation Optimization of Hidden Markov Models
(2000)
We proposetwo finite difference two-timescale simultaneous perturbationstochastic approximation (SPSA)algorithmsfor simulation optimization ofhidden Markov models. Stability and convergence of both thealgorithms is ...
Improving Cluster Tool Performance by Finding the Optimal Sequence and Cyclic Sequence of Wafer Handler Moves
(2000)
The research aims to develop algorithms that can minimize the total lot processing time (makespan) of cluster tools used for semiconductor manufacturing. Previous research focuses on finding an optimal sequence of wafer ...
The Set-Valued Run-to-Run Controller with Ellipsoid Approximation
(2000)
In order to successfully apply Run-to-Run (RtR) control or real time control ina semiconductor process, it is very important to estimate the processmodel. Traditional semiconductor process control methods neglect theimportance ...
Comparison of Run-to-Run Control Methods in Semiconductor Manufacturing Processes
(2000)
Run-to Run (RtR) control plays an important role in semiconductor manufacturing.<p>In this paper, RtR control methods are generalized. The set-valued RtR controllers with ellipsoidapproximation are compared with other RtR ...
A Tool Optimization Interface for a Semiconductor Manufacturing System
(2000)
This paper will serve as the documentation for the Tool Optimization codeof the HSE software. The purpose of the software is, simply, to enable auser to optimize a factory's tool selection. This will be added to theexisting ...
Sensitivity Analysis and Discrete Stochastic Optimization for Semiconductor Manufacturing Systems
(2000)
The semiconductor industry is a capital-intensive industry with rapid time-to-market, short product development cycles, complex product flows and other characteristics. These factors make it necessary to utilize equipment ...
A Geometric Algorithm for Multi-Part Milling Cutter Selection
(2000)
Mass customization results in smaller batch sizes in manufacturing that require large numbers of setup and tool changes. The traditional process planning that generates plans for one part at a time is no longer applicable. ...