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Sequencing Wafer Handler Moves to Improve the Performance of Sequential Cluster Tools
(2000)
Cluster tools are highly integrated machines that can perform a sequence of semiconductor manufacturing processes. The sequence of wafer handler moves affects the total time needed to process a set of wafers. Reducing this ...
Sequencing Wafer Handler Moves to Improve the Performance of Hybrid Cluster Tools
(2000)
Cluster tools are highly integrated machines that can perform a sequence of semiconductor manufacturing processes. The sequence of wafer handler moves affects the total time needed to process a set of wafers.<p> Reducing ...
Comparing Gradient Estimation Methods Applied to Stochastic Manufacturing Systems
(2000)
This paper compares two gradient estimation methods that can be usedfor estimating the sensitivities of output metrics with respectto the input parameters of a stochastic manufacturing system.A brief description of the ...