Now showing items 1-2 of 2
The Set-Valued Run-to-Run Controller in Semiconductor Manufacturing Processes
In semiconductor manufacturing, run-to-run (RtR) control is paid moreand more attention. In this paper a set-valuedRtR control scheme is introduced. Different from conventional RtR controlmethods, the set-valued method ...
A Genetic Algorithm for a Minimax Network Design Problem
This paper considers the problem of designing a network to transport material from sources of supply to sites where demand occurs. However, the demand at each site is uncertain. We formulate the problem as a robust discrete ...