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An Approach to Fixed/Mobile Converged Routing
(2000)
We consider a family of routing protocols for networks in which the core topology is essentially fixed by where the end systems may be mobile. We refer to this form of routing as Fixed/Mobile Converged (FMC) routing.<p>This ...
Next Generation Satellite Systems for Aeronautical Communications
(2000)
The US airspace is reaching its capacity with the current Air Traffic Control system and a number of flights that is constantly rising, and estimated to be over 54 million per year by 2002. The FAA has undertaken several ...
Sequencing Wafer Handler Moves to Improve the Performance of Sequential Cluster Tools
(2000)
Cluster tools are highly integrated machines that can perform a sequence of semiconductor manufacturing processes. The sequence of wafer handler moves affects the total time needed to process a set of wafers. Reducing this ...
An Object-Oriented Programming Approach to Implement Global Spectral Methods: Application to Dynamic Simulation of a Chemical Infiltration Process
(2000)
Boundary-value problems (BVPs) in relatively simple geometriescan be solved using global spectral methods. These discretizationmethods are applicable to a wide range of problems and are suitablefor a "rapid prototyping" ...
WaterSim: A Computer Simulator and Integrated Educational Module for Semiconductor Manufacturing Systems
(2000)
The WaterSim program is an easy-to-use graphical user interface, a unique simulation module and an integrated educational module that was developed at the Institute for Systems Research at the University of Maryland. ...
Influence of Gas Composition on Wafer Temperature Control in a Tungsten Chemical Vapor Deposition Reactor
(2000)
Experimental measurements of wafer temperature in a single-wafer,lamp-heated CVD system were used to study the wafer temperature responseto gas composition. A physically based simulation procedure for theprocess gas and ...
Buffer Engineering for M|G|infinity Input Processes
(2000)
We suggest the $M|G|infty$ input process as a viable model forrepresenting the heavy correlations observed in network traffic.Originally introduced by Cox, this model represents the busy-serverprocess of an $M|G|infty$ ...
Maximum Likelihood Slow Frequency-Selective Fading Channel Estimation Using Frequency Domain Approach
(2000)
This paper addresses the channel estimation problem for slow frequency-selective fading channel using training sequence and maximum likelihood (ML) approach. <p>Traditional works assumed symbol period spaced delay-tapped ...
Real-Time Growth Rate Metrology for a Tungsten CVD Process by Acoustic Sensing
(2000)
An acoustic sensor, the Leybold Inficon ComposerTM, was implemented downstream to a production-scale tungsten chemical vapor deposition (CVD) cluster tool for in-situ process sensing. Process gases were sampled at the ...
Simulation-Based Approach for Semiconductor Fab-Level Decision Making - Implementation Issues
(2000)
In this paper, we discuss implementation issues of applying a simulation-based approach to asemiconductor fab-level decision making problem. The fab-level decision making problem isformulated as a Markov Decision Process ...